MKS Instruments · JSON-LD Context

Mks Instruments Context

JSON-LD context defining the semantic vocabulary for Mks Instruments from MKS Instruments.

7 Classes 13 Properties 4 Namespaces

View Context View on GitHub

Namespaces

schema: https://schema.org/

mks: https://www.mks.com/vocabulary#

qudt: http://qudt.org/schema/qudt/

owl: http://www.w3.org/2002/07/owl#

Classes

name description industry foundingDate legalName productCategory model

Properties

Property	Type	Container
MKSInstruments	reference
url	reference
sameAs	reference
Product	reference
manufacturer	reference
VacuumSystem	reference
GasDeliverySystem	reference
ProcessControl	reference
LaserSystem	reference
MotionControl	reference
Photonics	reference
Measurement	reference
Instrument	reference

JSON-LD Document

{
  "@context": {
    "@version": 1.1,
    "schema": "https://schema.org/",
    "mks": "https://www.mks.com/vocabulary#",
    "qudt": "http://qudt.org/schema/qudt/",
    "owl": "http://www.w3.org/2002/07/owl#",

    "MKSInstruments": {
      "@id": "schema:Organization",
      "@type": "@id"
    },
    "name": "schema:name",
    "url": {
      "@id": "schema:url",
      "@type": "@id"
    },
    "description": "schema:description",
    "industry": "schema:industry",
    "foundingDate": "schema:foundingDate",
    "legalName": "schema:legalName",
    "sameAs": {
      "@id": "schema:sameAs",
      "@type": "@id"
    },

    "Product": {
      "@id": "schema:Product",
      "@type": "@id"
    },
    "productCategory": "schema:category",
    "model": "schema:model",
    "manufacturer": {
      "@id": "schema:manufacturer",
      "@type": "@id"
    },

    "VacuumSystem": {
      "@id": "mks:VacuumSystem",
      "@type": "@id",
      "@context": {
        "pressureRange": "mks:pressureRange",
        "pumpType": "mks:pumpType",
        "chamberVolume": "mks:chamberVolume",
        "basePressure": "mks:basePressure"
      }
    },
    "GasDeliverySystem": {
      "@id": "mks:GasDeliverySystem",
      "@type": "@id",
      "@context": {
        "flowRate": "mks:flowRate",
        "gasSpecies": "mks:gasSpecies",
        "massFlowController": "mks:massFlowController",
        "pressureController": "mks:pressureController"
      }
    },
    "ProcessControl": {
      "@id": "mks:ProcessControl",
      "@type": "@id",
      "@context": {
        "setpoint": "mks:setpoint",
        "actualValue": "mks:actualValue",
        "controlLoop": "mks:controlLoop",
        "sensor": "mks:sensor"
      }
    },
    "LaserSystem": {
      "@id": "mks:LaserSystem",
      "@type": "@id",
      "@context": {
        "wavelength": "mks:wavelength",
        "pulseEnergy": "mks:pulseEnergy",
        "repetitionRate": "mks:repetitionRate",
        "beamQuality": "mks:beamQuality",
        "peakPower": "mks:peakPower"
      }
    },
    "MotionControl": {
      "@id": "mks:MotionControl",
      "@type": "@id",
      "@context": {
        "axis": "mks:axis",
        "positionAccuracy": "mks:positionAccuracy",
        "repeatability": "mks:repeatability",
        "speed": "mks:speed",
        "encoder": "mks:encoder"
      }
    },
    "Photonics": {
      "@id": "mks:Photonics",
      "@type": "@id",
      "@context": {
        "opticalComponent": "mks:opticalComponent",
        "transmittance": "mks:transmittance",
        "coatingType": "mks:coatingType",
        "aperture": "mks:aperture"
      }
    },
    "Measurement": {
      "@id": "qudt:Quantity",
      "@type": "@id",
      "@context": {
        "value": "qudt:value",
        "unit": {
          "@id": "qudt:unit",
          "@type": "@id"
        }
      }
    },
    "Instrument": {
      "@id": "schema:Product",
      "@type": "@id",
      "@context": {
        "serialNumber": "schema:serialNumber",
        "firmwareVersion": "mks:firmwareVersion",
        "calibrationDate": "mks:calibrationDate",
        "communicationInterface": "mks:communicationInterface"
      }
    }
  },
  "@type": "schema:Organization",
  "schema:name": "MKS Instruments",
  "schema:url": "https://www.mks.com/",
  "schema:description": "Global provider of foundational technology solutions for semiconductor manufacturing, electronics and packaging, and specialty industrial markets.",
  "schema:industry": [
    "Semiconductor Manufacturing",
    "Industrial Technology",
    "Instrumentation",
    "Photonics",
    "Vacuum Technology",
    "Process Control"
  ],
  "schema:sameAs": [
    "https://www.linkedin.com/company/mks-instruments",
    "https://ir.mks.com/"
  ]
}