KLA · JSON-LD Context
Kla Tencor Context
JSON-LD context defining the semantic vocabulary for Kla Tencor from KLA.
9 Classes
15 Properties
3 Namespaces
Namespaces
schema:
https://schema.org/
kla:
https://www.kla.com/vocabulary#
skos:
http://www.w3.org/2004/02/skos/core#
Classes
Organization
name
url
description
industry
foundingDate
legalName
sameAs
Product
Properties
| Property | Type | Container |
|---|---|---|
| KLACorporation | schema:Organization | |
| processControl | skos:Concept | |
| metrology | skos:Concept | |
| waferInspection | skos:Concept | |
| reticleInspection | skos:Concept | |
| overlay | skos:Concept | |
| criticalDimension | skos:Concept | |
| yieldManagement | skos:Concept | |
| computationalAnalytics | skos:Concept | |
| defectClassification | skos:Concept | |
| advancedPackaging | skos:Concept | |
| InspectionSystem | schema:Product | |
| MetrologyTool | schema:Product | |
| WaferNode | ||
| ReticleNode |
JSON-LD Document
{
"@context": {
"@version": 1.1,
"schema": "https://schema.org/",
"kla": "https://www.kla.com/vocabulary#",
"skos": "http://www.w3.org/2004/02/skos/core#",
"Organization": "schema:Organization",
"name": "schema:name",
"url": "schema:url",
"description": "schema:description",
"industry": "schema:industry",
"foundingDate": "schema:foundingDate",
"legalName": "schema:legalName",
"sameAs": "schema:sameAs",
"KLACorporation": {
"@id": "https://www.kla.com",
"@type": "schema:Organization",
"schema:name": "KLA Corporation",
"schema:legalName": "KLA Corporation",
"schema:url": "https://www.kla.com",
"schema:description": "Leader in process control and process-enabling solutions for semiconductor wafer and reticle manufacturing, integrated circuits, packaging, printed circuit boards, and flat panel displays.",
"schema:industry": "Semiconductor Equipment and Process Control",
"schema:foundingDate": "1975",
"schema:sameAs": [
"https://www.linkedin.com/company/kla-corporation",
"https://en.wikipedia.org/wiki/KLA_Corporation"
]
},
"processControl": {
"@id": "kla:processControl",
"@type": "skos:Concept",
"skos:prefLabel": "Process Control",
"skos:definition": "Systems and techniques used to monitor, measure, and control semiconductor manufacturing processes to ensure wafers and devices meet specifications."
},
"metrology": {
"@id": "kla:metrology",
"@type": "skos:Concept",
"skos:prefLabel": "Metrology",
"skos:definition": "Precision measurement of critical dimensions, film thickness, overlay accuracy, and other physical parameters on wafers and reticles."
},
"waferInspection": {
"@id": "kla:waferInspection",
"@type": "skos:Concept",
"skos:prefLabel": "Wafer Inspection",
"skos:definition": "Automated optical or electron-beam scanning of silicon wafers to detect surface defects, particles, and pattern anomalies."
},
"reticleInspection": {
"@id": "kla:reticleInspection",
"@type": "skos:Concept",
"skos:prefLabel": "Reticle Inspection",
"skos:definition": "High-precision inspection of photomasks used in photolithography to ensure they are free of defects."
},
"overlay": {
"@id": "kla:overlay",
"@type": "skos:Concept",
"skos:prefLabel": "Overlay",
"skos:definition": "The alignment accuracy between successive lithographic layers printed on a wafer."
},
"criticalDimension": {
"@id": "kla:criticalDimension",
"@type": "skos:Concept",
"skos:prefLabel": "Critical Dimension",
"skos:altLabel": "CD",
"skos:definition": "The smallest feature size that must be accurately controlled in a semiconductor device."
},
"yieldManagement": {
"@id": "kla:yieldManagement",
"@type": "skos:Concept",
"skos:prefLabel": "Yield Management",
"skos:definition": "Practices and systems used to maximize the percentage of functional chips produced from a semiconductor wafer."
},
"computationalAnalytics": {
"@id": "kla:computationalAnalytics",
"@type": "skos:Concept",
"skos:prefLabel": "Computational Analytics",
"skos:definition": "Data analysis and machine learning algorithms applied to inspection and metrology data to identify patterns and optimize manufacturing processes."
},
"defectClassification": {
"@id": "kla:defectClassification",
"@type": "skos:Concept",
"skos:prefLabel": "Defect Classification",
"skos:definition": "Automated categorization of detected defects by type, size, and origin using machine learning and image analysis."
},
"advancedPackaging": {
"@id": "kla:advancedPackaging",
"@type": "skos:Concept",
"skos:prefLabel": "Advanced Packaging",
"skos:definition": "Semiconductor packaging techniques beyond traditional wire-bonding, including flip-chip, wafer-level packaging, and 2.5D/3D integration."
},
"Product": "schema:Product",
"InspectionSystem": {
"@id": "kla:InspectionSystem",
"@type": "schema:Product",
"skos:definition": "A hardware and software system used to detect defects on semiconductor wafers or reticles."
},
"MetrologyTool": {
"@id": "kla:MetrologyTool",
"@type": "schema:Product",
"skos:definition": "Precision measurement equipment used to quantify physical properties of semiconductor structures."
},
"WaferNode": {
"@id": "kla:WaferNode",
"skos:prefLabel": "Wafer",
"skos:definition": "A thin slice of semiconductor material used as the substrate for microelectronic devices."
},
"ReticleNode": {
"@id": "kla:ReticleNode",
"skos:prefLabel": "Reticle",
"skos:altLabel": "Photomask",
"skos:definition": "A glass plate containing the circuit pattern for a single chip layer, used in photolithography to expose wafer resist."
}
}
}